draw MEMS process steps

Version 1.0.0.0 (4.78 KB) by Gu Gu
draw MEMS fabrication steps using matlab
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1.4K Downloads
Updated 30 Aug 2007

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several matlab functions assist to drawing MEMS fabrication steps, including deposit, lithograph, etch (no lift-off), remove photo resistor.

make the annoying process step drawing easier.

Welcome any comments and suggestion.

Cite As

Gu Gu (2024). draw MEMS process steps (https://www.mathworks.com/matlabcentral/fileexchange/16167-draw-mems-process-steps), MATLAB Central File Exchange. Retrieved .

MATLAB Release Compatibility
Created with R14SP1
Compatible with any release
Platform Compatibility
Windows macOS Linux

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Version Published Release Notes
1.0.0.0