draw MEMS process steps

draw MEMS fabrication steps using matlab

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several matlab functions assist to drawing MEMS fabrication steps, including deposit, lithograph, etch (no lift-off), remove photo resistor.

make the annoying process step drawing easier.

Welcome any comments and suggestion.

Cite As

Gu Gu (2026). draw MEMS process steps (https://www.mathworks.com/matlabcentral/fileexchange/16167-draw-mems-process-steps), MATLAB Central File Exchange. Retrieved .

General Information

MATLAB Release Compatibility

  • Compatible with any release

Platform Compatibility

  • Windows
  • macOS
  • Linux
Version Published Release Notes Action
1.0.0.0