It seems there is the possibility for master and slave to simultaneously evaluate the same set of parameters. For example, if slave starts evaluating a slow process, master can catch up, and there is nothing to prevent it to start the very same computation since slave hasn't generated the result file yet. There is also a bug in setfilesemaphore.m. dirStruct(k).datenum in line 78 should be datenum(dirStruct(k).date).