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Nano- and Micro-Electromechanical Systems, 2e: Fundamentals of Nano- and Microengineering
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Sergey Edward Lyshevski, Rochester Institute of Technology
CRC Press, Inc., 2005 Outside North America
ISBN: 0-8493-2838-1 |
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Written for senior undergraduate or graduate courses, this book introduces nano- and microsystems, devices, and structures. The text emphasizes the multidisciplinary principles of NEMS and MEMS and practical applications of the basic theory in engineering practice and technology development.
MATLAB and Simulink are introduced and used throughout the book to solve application examples.
