Written for students and professionals, Fundamental Principles of Optical Lithography: The Science of Microfabrication covers the fundamental principles of semiconductor microlithography. Its focus is on the underlying scientific principles of optical lithography, rather than its practice. Topics covered include basics of IC fabrication, Moore’s law and the semiconductor industry, mathematical description of light, and imaging with scanners versus steppers.
A laboratory manual to accompany the textbook is available for download. The manual uses MATLAB to enable students to write their own code for performing complex lithography calculations.