MATLAB Helps Save Time and Effort by Streamlined Commissioning of the QuiET System
Ralph Coleman, ETEL
ETEL offers a wide range of motion systems, from standalone products to highly integrated platforms. It addresses the most stringent requirements mainly in semiconductor and electronics applications, allowing machine builders to focus on their core competence. The motion platforms not only include the motion system and controllers, but can also benefit from the active isolation module QuiET. This module cancels both stage-born and ground-born vibrations along six degrees of freedom, preventing them from disturbing the process taking place on top of the motion platform.
The presentation looks back to the earliest stages of development of this product, where rapid prototyping using Simulink Real-Time™ was used to quickly test various algorithms to speed up the development. It highlights the advantages of using MATLAB® to process the measurement data and develop multivariable calibration methods.
When the software was implemented in standard controllers, the algorithms in the commissioning tools were enhanced, taking advantage of the deterministic motion control architecture. Their final version has been built with the MATLAB Compiler™ and includes:
- Automatic tuning of the feed-forward parameters
- Identification of the system
- Built-in levelling capabilities
Recorded: 23 Jun 2016
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